A Capacitive Pressure Sensor with Linearity and High Sensitivity over a Wide Pressure Range using Thermoplastic Microspheres

نویسندگان

چکیده

A flexible pressure sensor with a linear response over wide range high sensitivity is extremely desirable for high-pressure applications, such as monitoring body weight and plantar distributions. As promising candidate to achieve the sensitivity, porous structure in capacitive sensors essential. However, this invokes early saturation of owing low compression modulus. In study, thermoplastic microspheres (TPM) materials are utilized, demonstrate solution-processed simple that highly sensitive (3.1 × 10−3 kPa−1) (1 MPa) linearity (R2 = 0.996). The TPM-containing responds within 100 ms can withstand 10 000 times cyclic test under 150 kPa. may be attributed rigid characteristics membrane. These results show has sufficient reduce need complex system calibrations potential applications distribution monitoring.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Design of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane

This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...

متن کامل

A Graphene-Based Resistive Pressure Sensor with Record-High Sensitivity in a Wide Pressure Range

Pressure sensors are a key component in electronic skin (e-skin) sensing systems. Most reported resistive pressure sensors have a high sensitivity at low pressures (<5 kPa) to enable ultra-sensitive detection. However, the sensitivity drops significantly at high pressures (>5 kPa), which is inadequate for practical applications. For example, actions like a gentle touch and object manipulation h...

متن کامل

Modeling of capacitance and sensitivity of a MEMS pressure sensor

In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM).  It can b...

متن کامل

Simulation and Modeling of a High Sensitivity Micro-electro-mechanical Systems Capacitive Pressure Sensor with Small Size and Clamped Square Diaphragm

This paper proposes a Micro-electro-mechanical (MEMS) capacitive pressure sensor that relies on the movable electrode displaced like a flat plate equal to the maximum center deflection of diaphragm. The diaphragm, movable electrode and mechanical coupling are made of polysilicon, gold and Si3N4, respectively. The fixed electrode is gold and the substrate is Pyrex glass. This proposed method inc...

متن کامل

Surface-modified piezoresistive nanocomposite flexible pressure sensors with high sensitivity and wide linearity.

Flexible pressure sensors working in a low pressure range (<10 kPa) have become an important part of recent research due to their applications in "artificial skin", foldable electronics and so on. Several efforts have been focused on the high sensitivity of devices with the neglect of linearity which is essential for real applications. Here, we present a device with a new Gaussian random distri...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Advanced electronic materials

سال: 2023

ISSN: ['2199-160X']

DOI: https://doi.org/10.1002/aelm.202201304